"Fabrication of 3D MEMS toroidal microinductor for high temperature ..."

Chong Lei et al. (2006)

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DOI: 10.1016/J.MEJO.2006.07.005

access: closed

type: Journal Article

metadata version: 2020-02-22

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Chong Lei, Yong Zhou, Xiao-Yu Gao, Wen Ding, Ying Cao, Zhi-Min Zhou, Hyung Choi:
Fabrication of 3D MEMS toroidal microinductor for high temperature application. Microelectron. J. 37(11): 1347-1351 (2006)

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