"Design and optimisation of a high-temperature silicon micro-hotplate for ..."

Siu Man Lee, D. C. Dyer, Julian W. Gardner (2003)

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DOI: 10.1016/S0026-2692(02)00153-2

access: closed

type: Journal Article

metadata version: 2023-10-28

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Siu Man Lee, D. C. Dyer, Julian W. Gardner:
Design and optimisation of a high-temperature silicon micro-hotplate for nanoporous palladium pellistors. Microelectron. J. 34(2): 115-126 (2003)

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