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"Simulation of boron diffusion in Si and strained SiGe layers."
R. Kinder et al. (2007)
- R. Kinder, F. Schwierz, P. Beno, J. Geßner:
Simulation of boron diffusion in Si and strained SiGe layers. Microelectron. J. 38(4-5): 576-582 (2007)
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