"Efficient electron beam condensing for low-energy microcolumn lithography."

Ho Seob Kim et al. (2008)

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DOI: 10.1016/J.MEJO.2007.09.030

access: closed

type: Journal Article

metadata version: 2020-02-22

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Ho Seob Kim, Seungjoon Ahn, Dae Wook Kim, Tae-Sik Oh, Seong Joon Ahn:
Efficient electron beam condensing for low-energy microcolumn lithography. Microelectron. J. 39(1): 94-98 (2008)

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