"Effect of nanoimprinted surface relief on Si and Ge nucleation and ordering."

Theodore I. Kamins et al. (2006)

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DOI: 10.1016/J.MEJO.2006.05.023

access: closed

type: Journal Article

metadata version: 2020-02-24

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  - https://dblp.org/rec/journals/mj/KaminsYSPXC06
Theodore I. Kamins, Amir A. Yasseri, Shashank Sharma, R. Fabian W. Pease, Qiangfei Xia, Stephen Y. Chou:
Effect of nanoimprinted surface relief on Si and Ge nucleation and ordering. Microelectron. J. 37(12): 1481-1485 (2006)

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