"CMOS compatible bulk micromachined silicon piezoresistive accelerometer ..."

S. Kal et al. (2006)

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DOI: 10.1016/J.MEJO.2005.06.020

access: closed

type: Journal Article

metadata version: 2023-09-30

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S. Kal, Soumen K. Das, D. K. Maurya, Kanishka Biswas, Adepu Ravi Sankar, S. K. Lahiri:
CMOS compatible bulk micromachined silicon piezoresistive accelerometer with low off-axis sensitivity. Microelectron. J. 37(1): 22-30 (2006)

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