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"Stress and resistivity analysis of electrodeposited gold films for MEMS ..."

Subhadeep Kal et al. (2006)

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DOI: 10.1016/J.MEJO.2006.07.006

access: closed

type: Journal Article

metadata version: 2023-01-25

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Subhadeep Kal, A. Bagolini, Benno Margesin, M. Zen:
Stress and resistivity analysis of electrodeposited gold films for MEMS application. Microelectron. J. 37(11): 1329-1334 (2006)

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