"Raman bands in microwave plasma assisted chemical vapour deposited films."

Magdalena Kadlecíková et al. (2003)

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DOI: 10.1016/J.MEJO.2003.09.002

access: closed

type: Journal Article

metadata version: 2024-10-06

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Magdalena Kadlecíková, Juraj Breza, Marián Veselý, Zdenek Frgala, Vít Kudrle, Jan Janca, Jan Janík, Jirí Bursík:
Raman bands in microwave plasma assisted chemical vapour deposited films. Microelectron. J. 34(11): 1075-1077 (2003)

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