"Displacement measurement technology of nano grating sensor based on HHT ..."

Cuili Jiang, Zhihui Tian, Wenjiao Yu (2021)

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DOI: 10.1016/J.MEJO.2020.104986

access: closed

type: Journal Article

metadata version: 2021-03-19

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Cuili Jiang, Zhihui Tian, Wenjiao Yu:
Displacement measurement technology of nano grating sensor based on HHT algorithm. Microelectron. J. 109: 104986 (2021)

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