"Convex corners undercutting and rhombus compensation in KOH with and ..."

Cuiping Jia et al. (2006)

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DOI: 10.1016/J.MEJO.2006.07.008

access: closed

type: Journal Article

metadata version: 2020-02-22

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Cuiping Jia, Wei Dong, Caixia Liu, Xindong Zhang, Jingran Zhou, Zhicheng Zhong, Hailin Xue, Huidong Zang, Baokun Xu, Weiyou Chen:
Convex corners undercutting and rhombus compensation in KOH with and without IPA solution on (110) silicon. Microelectron. J. 37(11): 1297-1301 (2006)

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