"Hot-Probe method for evaluation of impurities concentration in semiconductors."

Gady Golan et al. (2006)

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DOI: 10.1016/J.MEJO.2006.01.014

access: closed

type: Journal Article

metadata version: 2020-02-22

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Gady Golan, Alex Axelevitch, B. Gorenstein, V. Manevych:
Hot-Probe method for evaluation of impurities concentration in semiconductors. Microelectron. J. 37(9): 910-915 (2006)

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