"Expanding the dose window of step-etched space-modulated JTE for ultrahigh ..."

Lixin Geng, Ruifeng Yue, Yan Wang (2024)

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DOI: 10.1016/J.MEJO.2024.106387

access: closed

type: Journal Article

metadata version: 2024-09-20

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Lixin Geng, Ruifeng Yue, Yan Wang:
Expanding the dose window of step-etched space-modulated JTE for ultrahigh voltage 4H-SiC devices. Microelectron. J. 152: 106387 (2024)

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