"Growth, structure, and morphology of TiO2 films deposited by ..."

Patrick Fisher et al. (2006)

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DOI: 10.1016/J.MEJO.2006.05.010

access: closed

type: Journal Article

metadata version: 2020-02-22

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Patrick Fisher, Oleg Maksimov, Hui Du, Volker D. Heydemann, Marek Skowronski, Paul A. Salvador:
Growth, structure, and morphology of TiO₂ films deposited by molecular beam epitaxy in pure ozone ambients. Microelectron. J. 37(12): 1493-1497 (2006)

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