"Nanomechanical characterization of polymer using atomic force microscopy ..."

Te-Hua Fang, Win-Jin Chang, Sung-Lin Tsai (2005)

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DOI: 10.1016/J.MEJO.2004.10.003

access: closed

type: Journal Article

metadata version: 2020-02-22

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Te-Hua Fang, Win-Jin Chang, Sung-Lin Tsai:
Nanomechanical characterization of polymer using atomic force microscopy and nanoindentation. Microelectron. J. 36(1): 55-59 (2005)

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