"Optical properties of silicon rich silicon oxides obtained by PECVD."

B. Díaz et al. (2004)

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DOI: 10.1016/S0026-2692(03)00224-6

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type: Journal Article

metadata version: 2024-03-28

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B. Díaz, José A. Rodríguez, Montse Riera, Andreu Llobera, Carlos Domínguez, Joaquín Tutor-Sánchez:
Optical properties of silicon rich silicon oxides obtained by PECVD. Microelectron. J. 35(1): 65-67 (2004)

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