"Characterization of embedded microheater of a CMOS-MEMS gravimetric sensor ..."

John Ojur Dennis et al. (2016)

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DOI: 10.1016/J.MEJO.2016.07.005

access: closed

type: Journal Article

metadata version: 2021-10-14

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John Ojur Dennis, Almur Abdelkreem Saeed Rabih, Mohd Haris M. Khir, Abdelaziz Yousif Ahmed, Mawahib Gafare Abdalrahman Ahmed, Muhammad Umer Mian:
Characterization of embedded microheater of a CMOS-MEMS gravimetric sensor device. Microelectron. J. 55: 179-188 (2016)

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