"Fabrication and characterization of a microelectromechanical tunable ..."

Ching-Liang Dai, Shih-Chieh Lin, Ming-Wei Chang (2007)

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DOI: 10.1016/J.MEJO.2007.09.026

access: closed

type: Journal Article

metadata version: 2022-10-02

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Ching-Liang Dai, Shih-Chieh Lin, Ming-Wei Chang:
Fabrication and characterization of a microelectromechanical tunable capacitor. Microelectron. J. 38(12): 1257-1262 (2007)

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