"Micro FET pressure sensor manufactured using CMOS-MEMS technique."

Ching-Liang Dai et al. (2008)

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DOI: 10.1016/J.MEJO.2007.12.015

access: closed

type: Journal Article

metadata version: 2022-10-02

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Ching-Liang Dai, Pin-Hsu Kao, Yao-Wei Tai, Chyan-Chyi Wu:
Micro FET pressure sensor manufactured using CMOS-MEMS technique. Microelectron. J. 39(5): 744-749 (2008)

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