"A capacitive pressure-sensitive chip with linkage film."

Rongyan Chuai et al. (2021)

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DOI: 10.1016/J.MEJO.2021.105313

access: closed

type: Journal Article

metadata version: 2021-12-10

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Rongyan Chuai, Bing Zhang, Yuxin Yang, Guimin Jiang, He Zhang, Xin Li:
A capacitive pressure-sensitive chip with linkage film. Microelectron. J. 118: 105313 (2021)

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