"Atomic force microscopy (AFM) and X-ray diffraction (XRD) investigations ..."

Kah-Yoong Chan, Bee-San Teo (2006)

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DOI: 10.1016/J.MEJO.2006.04.008

access: closed

type: Journal Article

metadata version: 2022-10-02

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Kah-Yoong Chan, Bee-San Teo:
Atomic force microscopy (AFM) and X-ray diffraction (XRD) investigations of copper thin films prepared by dc magnetron sputtering technique. Microelectron. J. 37(10): 1064-1071 (2006)

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