"Fabrication of a MEMS inertia switch on quartz substrate and evaluation of ..."

Haogang Cai et al. (2008)

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DOI: 10.1016/J.MEJO.2008.01.068

access: closed

type: Journal Article

metadata version: 2020-02-22

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Haogang Cai, Zhuoqing Yang, Guifu Ding, Xiao-Lin Zhao:
Fabrication of a MEMS inertia switch on quartz substrate and evaluation of its threshold acceleration. Microelectron. J. 39(9): 1112-1119 (2008)

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