"A new MEMS based variable capacitor with wide tunability, high linearity ..."

Saeid Afrang et al. (2015)

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DOI: 10.1016/J.MEJO.2014.11.006

access: closed

type: Journal Article

metadata version: 2020-02-22

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Saeid Afrang, Hamed Mobki, Morteza Homayoun Sadeghi, Ghader Rezazadeh:
A new MEMS based variable capacitor with wide tunability, high linearity and low actuation voltage. Microelectron. J. 46(2): 191-197 (2015)

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