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"A Fast, Large-Stroke Electrothermal MEMS Mirror Based on Cu/W Bimorph."

Xiaoyang Zhang, Liang Zhou, Huikai Xie (2015)

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DOI: 10.3390/MI6121460

access: open

type: Journal Article

metadata version: 2018-08-14

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  dblp key:
  - journals/micromachines/ZhangZX15
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  persistent URL:
  - https://dblp.org/rec/journals/micromachines/ZhangZX15
Xiaoyang Zhang, Liang Zhou, Huikai Xie:
A Fast, Large-Stroke Electrothermal MEMS Mirror Based on Cu/W Bimorph. Micromachines 6(12): 1876-1889 (2015)

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