"Research on the Piezoelectric Properties of AlN Thin Films for MEMS ..."

Meng Zhang et al. (2015)

> Home

Details and statistics

DOI: 10.3390/MI6091236

access: open

type: Journal Article

metadata version: 2024-06-18

- view
  - electronic edition via DOI (open access)
  authority control:
- export record
  dblp key:
  - journals/micromachines/ZhangYSHZN15
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/journals/micromachines/ZhangYSHZN15
Meng Zhang, Jian Yang, Chaowei Si, Guowei Han, Yongmei Zhao, Jin Ning:
Research on the Piezoelectric Properties of AlN Thin Films for MEMS Applications. Micromachines 6(9): 1236-1248 (2015)

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.