"Researching the Aluminum Nitride Etching Process for Application in MEMS ..."

Jian Yang et al. (2015)

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DOI: 10.3390/MI6020281

access: open

type: Journal Article

metadata version: 2024-06-18

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  - journals/micromachines/YangSHZMZN15
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  - https://dblp.org/rec/journals/micromachines/YangSHZMZN15
Jian Yang, Chaowei Si, Guowei Han, Meng Zhang, Liuhong Ma, Yongmei Zhao, Jin Ning:
Researching the Aluminum Nitride Etching Process for Application in MEMS Resonators. Micromachines 6(2): 281-290 (2015)

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