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"Researching the Aluminum Nitride Etching Process for Application in MEMS ..."
Jian Yang et al. (2015)
- Jian Yang, Chaowei Si, Guowei Han, Meng Zhang, Liuhong Ma, Yongmei Zhao, Jin Ning:
Researching the Aluminum Nitride Etching Process for Application in MEMS Resonators. Micromachines 6(2): 281-290 (2015)
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