"Multifunctional Platform with CMOS-Compatible Tungsten Microhotplate for ..."

Jiaqi Wang, Jun Yu (2015)

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DOI: 10.3390/MI6111443

access: open

type: Journal Article

metadata version: 2018-08-14

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  - journals/micromachines/WangY15
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  - https://dblp.org/rec/journals/micromachines/WangY15
Jiaqi Wang, Jun Yu:
Multifunctional Platform with CMOS-Compatible Tungsten Microhotplate for Pirani, Temperature, and Gas Sensor. Micromachines 6(11): 1597-1605 (2015)

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