"Resistless Fabrication of Nanoimprint Lithography (NIL) Stamps Using ..."

Luis Guillermo Villanueva et al. (2013)

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DOI: 10.3390/MI4040370

access: open

type: Journal Article

metadata version: 2023-09-30

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Luis Guillermo Villanueva, Oscar Vazquez-Mena, Cristina Martin-Olmos, Veronica Savu, Katrin Sidler, Juergen Brugger:
Resistless Fabrication of Nanoimprint Lithography (NIL) Stamps Using Nano-Stencil Lithography. Micromachines 4(4): 370-377 (2013)

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