"High-Performance Shuffle Motor Fabricated by Vertical Trench Isolation ..."

Edin Sarajlic et al. (2010)

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DOI: 10.3390/MI1020048

access: open

type: Journal Article

metadata version: 2021-10-14

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  - journals/micromachines/SarajlicYBTFK10
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  - https://dblp.org/rec/journals/micromachines/SarajlicYBTFK10
Edin Sarajlic, Christophe Yamahata, Erwin Berenschot, Niels R. Tas, Hiroyuki Fujita, Gijs J. M. Krijnen:
High-Performance Shuffle Motor Fabricated by Vertical Trench Isolation Technology. Micromachines 1(2): 48-67 (2010)

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