"Fabrication of Nanopillar Micropatterns by Hybrid Mask Lithography for ..."

Shinya Sakuma, Masakuni Sugita, Fumihito Arai (2013)

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DOI: 10.3390/MI4020232

access: open

type: Journal Article

metadata version: 2024-06-18

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  - https://dblp.org/rec/journals/micromachines/SakumaSA13
Shinya Sakuma, Masakuni Sugita, Fumihito Arai:
Fabrication of Nanopillar Micropatterns by Hybrid Mask Lithography for Surface-Directed Liquid Flow. Micromachines 4(2): 232-242 (2013)

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