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"A Hybrid Thermopneumatic and Electrostatic Microvalve with Integrated ..."
Joseph A. Potkay, Kensall D. Wise (2012)
- Joseph A. Potkay, Kensall D. Wise:
A Hybrid Thermopneumatic and Electrostatic Microvalve with Integrated Position Sensing. Micromachines 3(2): 379-395 (2012)
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