"Nonlinear Dynamic Behavior of a Bi-Axial Torsional MEMS Mirror with ..."

Mehmet Ozdogan, Shahrzad Towfighian (2016)

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DOI: 10.3390/MI7030042

access: open

type: Journal Article

metadata version: 2020-05-30

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Mehmet Ozdogan, Shahrzad Towfighian:
Nonlinear Dynamic Behavior of a Bi-Axial Torsional MEMS Mirror with Sidewall Electrodes. Micromachines 7(3): 42 (2016)

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