"A WSi-WSiN-Pt Metallization Scheme for Silicon Carbide-Based High ..."

Ha-Duong Ngo et al. (2016)

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DOI: 10.3390/MI7100193

access: open

type: Journal Article

metadata version: 2021-10-14

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  - https://dblp.org/rec/journals/micromachines/NgoMMKEL16
Ha-Duong Ngo, Biswajit Mukhopadhyay, Piotr Mackowiak, Kevin Kröhnert, Oswin Ehrmann, Klaus-Dieter Lang:
A WSi-WSiN-Pt Metallization Scheme for Silicon Carbide-Based High Temperature Microsystems. Micromachines 7(10): 193 (2016)

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