"Dynamic Wet Etching of Silicon through Isopropanol Alcohol Evaporation."

Tiago S. Monteiro et al. (2015)

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DOI: 10.3390/MI6101437

access: open

type: Journal Article

metadata version: 2024-06-18

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  - https://dblp.org/rec/journals/micromachines/MonteiroKGMC15
Tiago S. Monteiro, Pamakstys Kastytis, Luís Miguel Gonçalves, Graça Minas, Susana Cardoso:
Dynamic Wet Etching of Silicon through Isopropanol Alcohol Evaporation. Micromachines 6(10): 1534-1545 (2015)

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