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ORCID"Two-Layer Microstructures Fabricated by One-Step Anisotropic Wet Etching ..."
Han Lu et al. (2016)
- Han Lu, Hua Zhang, Mingliang Jin, Tao He, Guofu Zhou, Lingling Shui:
Two-Layer Microstructures Fabricated by One-Step Anisotropic Wet Etching of Si in KOH Solution. Micromachines 7(2): 19 (2016)
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