"Two-Layer Microstructures Fabricated by One-Step Anisotropic Wet Etching ..."

Han Lu et al. (2016)

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DOI: 10.3390/MI7020019

access: open

type: Journal Article

metadata version: 2019-07-29

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  - journals/micromachines/LuZJHZS16
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  - https://dblp.org/rec/journals/micromachines/LuZJHZS16
Han Lu, Hua Zhang, Mingliang Jin, Tao He, Guofu Zhou, Lingling Shui:
Two-Layer Microstructures Fabricated by One-Step Anisotropic Wet Etching of Si in KOH Solution. Micromachines 7(2): 19 (2016)

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