"Microfabrication of a Novel Ceramic Pressure Sensor with High Sensitivity ..."

Chen Li et al. (2014)

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DOI: 10.3390/MI5020396

access: open

type: Journal Article

metadata version: 2023-06-26

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Chen Li, Qiu-lin Tan, Wendong Zhang, Chenyang Xue, Yunzhi Li, Jijun Xiong:
Microfabrication of a Novel Ceramic Pressure Sensor with High Sensitivity Based on Low-Temperature Co-Fired Ceramic (LTCC) Technology. Micromachines 5(2): 396-407 (2014)

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