"Liquid Encapsulation in Parylene Microstructures Using Integrated ..."

Christian A. Gutierrez, Ellis Meng (2011)

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DOI: 10.3390/MI2030356

access: open

type: Journal Article

metadata version: 2018-08-14

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Christian A. Gutierrez, Ellis Meng:
Liquid Encapsulation in Parylene Microstructures Using Integrated Annular-Plate Stiction Valves. Micromachines 2(3): 356-368 (2011)

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