"Rounding of Negative Dry Film Resist by Diffusive Backside Exposure ..."

Philipp Frank et al. (2015)

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DOI: 10.3390/MI6111442

access: open

type: Journal Article

metadata version: 2024-10-17

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  - https://dblp.org/rec/journals/micromachines/FrankHPR15
Philipp Frank, Sebastian Haefner, Georgi Paschew, Andreas Richter:
Rounding of Negative Dry Film Resist by Diffusive Backside Exposure Creating Rounded Channels for Pneumatic Membrane Valves. Micromachines 6(11): 1588-1596 (2015)

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