"Mechanically-Tunable Photonic Devices with On-Chip Integrated MEMS/NEMS ..."

Han Du, Fook Siong Chau, Guangya Zhou (2016)

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DOI: 10.3390/MI7040069

access: open

type: Journal Article

metadata version: 2022-10-02

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Han Du, Fook Siong Chau, Guangya Zhou:
Mechanically-Tunable Photonic Devices with On-Chip Integrated MEMS/NEMS Actuators. Micromachines 7(4): 69 (2016)

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