"Special Issue: 15 Years of SU8 as MEMS Material."

Arnaud Bertsch, Philippe Renaud (2015)

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DOI: 10.3390/MI6060790

access: open

type: Journal Article

metadata version: 2023-09-30

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Arnaud Bertsch, Philippe Renaud:
Special Issue: 15 Years of SU8 as MEMS Material. Micromachines 6(6): 790-792 (2015)

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