"Study and simulation of the sputtering process of material layers in plasma."

Abdelkader Bouazza, Abderrahmane Settaouti (2016)

> Home

Details and statistics

DOI: 10.1515/MCMA-2016-0106

access: closed

type: Journal Article

metadata version: 2022-06-23

- view
  - electronic edition via DOI
  - unpaywalled version
  authority control:
- export record
  dblp key:
  - journals/mcma/BouazzaS16
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/journals/mcma/BouazzaS16
Abdelkader Bouazza, Abderrahmane Settaouti:
Study and simulation of the sputtering process of material layers in plasma. Monte Carlo Methods Appl. 22(2): 149-159 (2016)

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.