"New etching techniques for semiconductors."

J. A. Edwards (1985)

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DOI: 10.1016/0141-9331(85)90273-X

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type: Journal Article

metadata version: 2020-02-22

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J. A. Edwards:
New etching techniques for semiconductors. Microprocess. Microsystems 9(5): 250-252 (1985)

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