"Measurement and tracking control of the Z-tilts error compensating stage ..."

Van-Tsai Liu et al. (2010)

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DOI: 10.1108/03684921011046807

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type: Journal Article

metadata version: 2022-01-03

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Van-Tsai Liu, Chien-Hung Liu, Hau-Wei Li, Chieh-Li Chen, Chun-Liang Lin, Yu-Chen Lin:
Measurement and tracking control of the Z-tilts error compensating stage of the nano-measuring machine. Kybernetes 39(6): 1029-1039 (2010)

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