"Microfabrication technology for non-coplanar resonant beams and crab-leg ..."

Jianqiang Han et al. (2013)

> Home

Details and statistics

DOI: 10.1631/JZUS.C1200251

access: closed

type: Journal Article

metadata version: 2020-05-13

- view
  - electronic edition via DOI
  - unpaywalled version
  authority control:
- export record
  dblp key:
  - journals/jzusc/HanFLLL13
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/journals/jzusc/HanFLLL13
Jianqiang Han, Ri-sheng Feng, Yan Li, Sen-lin Li, Qing Li:
Microfabrication technology for non-coplanar resonant beams and crab-leg supporting beams of dual-axis bulk micromachined resonant accelerometers. J. Zhejiang Univ. Sci. C 14(1): 65-74 (2013)

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.