"Splash suppression during wafer wet cleaning through drop penetration ..."

Chan-Woo Park et al. (2020)

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DOI: 10.1007/S12650-019-00620-2

access: closed

type: Journal Article

metadata version: 2020-12-17

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Chan-Woo Park, Tae-Gun Kim, Min-Woo Kim, Ali Aldalbahi, Mohamed El-Newehy, Sam S. Yoon:
Splash suppression during wafer wet cleaning through drop penetration across metal meshes and porous fiber mats. J. Vis. 23(2): 269-285 (2020)

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