"A 22-ng/ $\surd$ Hz 17-mW Capacitive MEMS Accelerometer With Electrically ..."

Yuki Furubayashi et al. (2020)

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DOI: 10.1109/JSSC.2020.2991533

access: closed

type: Journal Article

metadata version: 2020-09-19

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  - https://dblp.org/rec/journals/jssc/FurubayashiOYWM20
Yuki Furubayashi, Takashi Oshima, Taizo Yamawaki, Keiki Watanabe, Keijiro Mori, Naoki Mori, Akira Matsumoto, Yudai Kamada, Atsushi Isobe, Tomonori Sekiguchi:
A 22-ng/ $\surd$ Hz 17-mW Capacitive MEMS Accelerometer With Electrically Separated Mass Structure and Digital Noise- Reduction Techniques. IEEE J. Solid State Circuits 55(9): 2539-2552 (2020)

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