"Application and evaluation of direct-write electron beam for ASICs."

Minoru Fujita et al. (1988)

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DOI: 10.1109/4.1015

access: closed

type: Journal Article

metadata version: 2024-11-05

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Minoru Fujita, Kenji Shiozawa, Tetsurou Kase, Hajime Hayakawa, Fumio Mizuno, Ryo Haruta, Fumio Murai, Shinji Okazaki:
Application and evaluation of direct-write electron beam for ASICs. IEEE J. Solid State Circuits 23(2): 514-519 (1988)

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