"Research on Nonlinear Dynamics of Drive Mode in Z-Axis Silicon ..."

Lu Xu et al. (2014)

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DOI: 10.1155/2014/801618

access: open

type: Journal Article

metadata version: 2019-06-02

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Lu Xu, Hongsheng Li, Jia Liu, Yunfang Ni, Libin Huang:
Research on Nonlinear Dynamics of Drive Mode in Z-Axis Silicon Microgyroscope. J. Sensors 2014: 801618:1-801618:11 (2014)

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