"Integrated MEMS/NEMS Resonant Cantilevers for Ultrasensitive Biological ..."

Xinxin Li et al. (2009)

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DOI: 10.1155/2009/637874

access: open

type: Journal Article

metadata version: 2023-10-25

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Xinxin Li, Haitao Yu, Xiaohua Gan, Xiaoyuan Xia, Pengcheng Xu, Jungang Li, Min Liu, Yongxiang Li:
Integrated MEMS/NEMS Resonant Cantilevers for Ultrasensitive Biological Detection. J. Sensors 2009: 637874:1-637874:10 (2009)

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