"Particle Detection for 100-nm Patterned Wafers by Evanescent Light ..."

Toshie Yoshioka, Takashi Miyoshi, Yasuhiro Takaya (2006)

> Home

Details and statistics

DOI: 10.20965/JRM.2006.P0705

access: closed

type: Journal Article

metadata version: 2020-04-01

- view
  - electronic edition via DOI
  - unpaywalled version
  authority control:
- export record
  dblp key:
  - journals/jrm/YoshiokaMT06
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/journals/jrm/YoshiokaMT06
Toshie Yoshioka, Takashi Miyoshi, Yasuhiro Takaya:
Particle Detection for 100-nm Patterned Wafers by Evanescent Light Illumination - Analysis of Evanescent Light Scattering Using Finite-Difference Time-Domain Method -. J. Robotics Mechatronics 18(6): 705-713 (2006)

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.