"Piezo-Impact-Driven X-Y Stage and Precise Sample Holder for Accurate ..."

Yuuka Irie et al. (2009)

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DOI: 10.20965/JRM.2009.P0635

access: closed

type: Journal Article

metadata version: 2020-04-01

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  - https://dblp.org/rec/journals/jrm/IrieAKFU09
Yuuka Irie, Hisayuki Aoyama, Junichi Kubo, Takahiro Fujioka, Takashi Usuda:
Piezo-Impact-Driven X-Y Stage and Precise Sample Holder for Accurate Microlens Alignment. J. Robotics Mechatronics 21(5): 635-641 (2009)

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